2010 IEEE International Conference on Robotics and Automation
Anchorage, Alaska, May 3-8, 2010

WorkShop:
"Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World"


Authors


- Andrew J. Fleming1 and Kam K. Leang2

1
Centre for Complex Dynamic Systems and Control,
School of Electrical Engineering and Computer Science,
University of Newcastle, Callaghan, NSW 2308, AUSTRALIA.

2 The Easy Lab,
Department of Mechanical Engineering,
University of Nevada Reno, Reno NV 89557, USA.

Title


Measurement and Control for High-Speed Sub-Atomic Positioning in Scanning Probe Microscopes

Abstract


Scanning probe microscopes require the control of position to within sub-atomic resolution. This workshop presentation will begin with an overview of the challenges and limitations encountered when attempting to achieve such resolution. This will be followed by an introduction to new measurement technologies and control techniques recently developed for high-speed nano- and micro-positioning systems, with application to scanning probe microscopy and fabrication.

Download the slide
here




Bio


Dr. Andrew J. Fleming is an Australian Research Council fellow stationed at the School of Electrical Engineering and Computer Science, The University of Newcastle, Australia. He is also the Deputy Program Leader for Mechatronics at the Center of Excellence for Complex Dynamic Systems and Control. His research includes nano-positioning, high-speed scanning probe microscopy, microcantilever sensors, and sensor-less control of sound and vibration.

School of Electrical Engineering and Computer Science
University of Newcastle, Callaghan, NSW 2308, Australia
Homepage: http://www.eng.newcastle.edu.au/~ajf203/

Dr. Kam K. Leang is an Assistant Professor at the Department of Mechanical Engineering, University of Nevada- Reno. He is also the director of the Electroactive Systems and Control Laboratory at the same institution. His research interests include: modelling and control of piezoactuators for scanning probe microscopy, fabrication and control of electroactive polymers, mechatronics, and the design of microelectromechanical systems (MEMS) for nanotechnology.

Department of Mechanical Engineering
University of Nevada Reno, Reno NV 89557, USA
Homepage: http://www.leang.com/academics/


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