2010 IEEE International Conference on Robotics and Automation
Anchorage, Alaska, May 3-8, 2010
"Signals Measurement and Estimation Techniques Issues in the Micro/Nano-World"
- Andrew J. Fleming1 and Kam K. Leang2
1 Centre for Complex Dynamic Systems and Control,
School of Electrical Engineering and Computer Science,
University of Newcastle, Callaghan, NSW 2308, AUSTRALIA.
2 The Easy Lab,
Department of Mechanical Engineering,
University of Nevada – Reno, Reno NV 89557, USA.
Measurement and Control for High-Speed Sub-Atomic Positioning in Scanning Probe Microscopes
Scanning probe microscopes require the control of position to within sub-atomic resolution. This
workshop presentation will begin with an overview of the challenges and limitations encountered
when attempting to achieve such resolution. This will be followed by an introduction to new
measurement technologies and control techniques recently developed for high-speed nano- and
micro-positioning systems, with application to scanning probe microscopy and fabrication.
Download the slide here
Dr. Andrew J. Fleming is an Australian Research Council fellow stationed at the
School of Electrical Engineering and Computer Science, The University of
Newcastle, Australia. He is also the Deputy Program Leader for Mechatronics at
the Center of Excellence for Complex Dynamic Systems and Control. His research
includes nano-positioning, high-speed scanning probe microscopy, microcantilever
sensors, and sensor-less control of sound and vibration.
School of Electrical Engineering and Computer Science
University of Newcastle, Callaghan, NSW 2308, Australia
Dr. Kam K. Leang is an Assistant Professor at the Department of Mechanical
Engineering, University of Nevada- Reno. He is also the director of the Electroactive
Systems and Control Laboratory at the same institution. His research interests
include: modelling and control of piezoactuators for scanning probe microscopy,
fabrication and control of electroactive polymers, mechatronics, and the design of
microelectromechanical systems (MEMS) for nanotechnology.
Department of Mechanical Engineering
University of Nevada – Reno, Reno NV 89557, USA
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